1993
Company was founded by H. Kurz, supported by State Ministry of Science of NRW
1996
Construction of the building and clean room for AMICA
1997
Inauguration of AMICA
First Interference Lithography Project
1998
UV Nanoimprint activities started
Nanoclub Lateral: National Network of Excellence on lateral Nanostructures
managed by AMICA
2000
CMOS Technology Platform installed
2002
PC-RAM Scaling Project (PC-RAM)
First 90 nm Triple-Gate Transistors
Photonic circuits made out of photonic crystals
High-K Gate stack Project KRISMOS started
Smallest Transistor in Europe, 12 nm SOI EJFET
2003
Photonic for all optical switching, Phoenix project
Soft-UV-Nanoimprint, SOUVENIR project
Joint Research and Development Agreement with EV Group
Saturn Transient Recorder launched
2004
NILCOM Network for the commercialisation of Nano-imprint Lithography launched
SINANO started, Network of Excellence on silicon based nanodevices
Successful Emulation of Infineon ASIC on a Venus-X (10 Mhz)
JDA & PA with Canberra for radiation sensors
ePIXnet Network of Excellence on integrated nano photonics
NNT 2004 Nanoimprint Conference organized by AMO in Vienna, Austria
2005
Nanoimprint Foundry Service started
Saturn Transient Recorder internationally available
2006
PullNano European NANOCMOS Integrated Project
OLAS, project on organic laser devices
Circles of Light, project for the convergence of electronics and silicon photonics
NanoFutur Award for young researchers by Federal Ministry of Education
and Research (BMBF) granted to Dr. Max Lemme
2007
First Graphene Transistor with Top Gate
