AMO offers flexible exposure and development services for gratings in a cleanroom environment on two dedicated actively stabilized interferometers. Pattern transfer and further processing can be carried out according to customer requirements. AMO provides highly spacial coherent gratings from 150 nm up to 1500 nm on several substrate up to 6" all with tailored pitch, etch depth and size.
Possible applications are:
- Diffraction Gratings
- Encoder Gratings
- Imprint Templates
- Polarizers
- Spectroscopy
- Beam Splitting
- Beam Scanning
- Laser Scanners
- Photonic Crystals
- Metrology
- Telecommunication Gratings
- Drug Discovery
Specifications
Interference Lithography (IL) is an optical holographic lithography technology where an interference pattern of two ultra violet light beams is recorded in a high resolution photo sensitive material. The patterns are stitch free and spatially coherent over many square centimetres with features smaller than 100 nm. The IL process at AMO is designed for high contrast gratings recorded in standard DUV photo resist suitable for anisotropic pattern transfer. IL is the most suitable lithography for precision gratings.
Interference Lithography Gratings in Stock
Linear |
image |
substrate |
size |
period |
uniformity |
etching depth |
ILL500-1 |
| Silicon | 6" | 500 | ± 5% | on demand |
ILL180-6 |
| Silicon | 6" | 180 | ± 5% | 130 |
ILL513-2 |
| Silicon | 6" | 513 | ± 5% | 150 |
ILL180-4 |
| Silicon | 6" | 180 | ± 5% | 130 |
Hole |
image |
substrate |
size |
period |
uniformity |
etching depth |
ILH513-6 |
| Silicon | 6" | 513 | ± 5% | 200 |
ILH500-4 |
| Silicon | 6" | 500 | ± 5% | on demand |
Post |
imagen |
substrat |
size |
periode |
uniformity |
etching depth |
ILP500-4 |
| Silicon | 4" | 500 | ± 5% | on demand |
ILP500-6 |
| Silicon | 6" | 500 | ± 5% | on demand |
Further holographic gratings with similar specifications are available and could be deep etched on request.
If you are interested in these periodic structures please fill in the request form or contact us directly.
Download Interference Lithography
