NanophotonicsAMO Silicon Nanophotonics TechnologyNanoimprint LithographyNanoelectronicsElectron Beam LithographyInterference LithographyEquipment
Nanophotonics

Silicon Nanophotonics Research Activities

DEVICE

Passive Components       Active Components                                   
  - low-loss waveguides        - heaters
  - spot-size converters        - modulators
  - grating couplers              - detectors

INTEGRATION

- Plasmonic Components                           
- THz devices

APPLICATION

- Multi-channel transmitters and 
  integrated routers
- Photonic chips with biosensors for             
  biomedical application

 

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