A CMOS-compatible plasmo-photonic Mach-Zehnder-interferometer
Researches from AMO GmbH and colleagues from the PLASMOfab project have demonstrated a CMOS-compatible plasmo-photonic Mach-Zehnder-interferometer based on aluminum and Si3N4 waveguides.
The bulk sensitivity of the device is the highest among all plasmo-photonic counterparts (4764 nm/RIU), and could be further increased by optimizing the design parameters of the interferometer. Furthermore, the device complies with CMOS manufacturing standards, which make it suitable for volume manufacturing.
This result has been published on Optics Express, and it is part of the larger effort of the PLASMOfab project to develop CMOS compatible plasmonics in a generic planar integration process, as the mean to consolidate photonic and electronic integration.
“Ultra-sensitive refractive index sensor using CMOS plasmonic transducers on silicon photonic interferometric platform”
A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, S. Suckow, L. Markey, J.-C. Weeber, A. Dereux, S. Schrittwieser, R. Heer, N. Pleros, and D. Tsiokos, Opt. Express 28, 20992-21001 (2020).
Dr. Anna Lena Giesecke