AMO expands its nanofabrication capabilities

On October 2nd, AMO has received the shipment of a new 200mm tool for Atomic Layer Deposition (ALD) from Oxford Instruments – just in time for the launch of the 2D Experimental Pilot Line (2D-EPL).  This acquisition has been possible thanks to the financial support of the Ministry of Economy, Innovation, Digitization and Energy of the Land North-Rhine Westphalia (MWIDE).

Delivery of the new ALD tool at AMO.

“The new ALD tool will help AMO and the Aachen Graphene & 2D Materials Center to move research on 2D materials closer to the market”, says AMO’s director Prof. Max Lemme. Indeed, the ALD tool is going to be integrated into the 2D Experimental Pilot Line of the Graphene Flagship, a major project with the goal of demonstrating how to manufacture electronic devices based on 2D materials in a way compatible with industrial standards.

“Two-dimensional materials have a huge innovation potential”, says Lemme. “Their unique properties can be the basis for new and disruptive long-term lines of development in the high-tech sectors. It is exactly 10 years ago that Sir Andre Geim and Sir Kostantin Novoselov recieved the Nobel Prize for the discovery of graphene – the first and the most illustrious two-dimensional material. Since then the field has grown enormously, and it is now time to bridge the gap between lab-scale fabrication and large volume production of electronic devices based on two-dimensional materials. It is a great opportunity for Europe – and for the Rhine region – to exploit the properties of 2D materials in the microelectronics sector.  We are very thankful to the MWIDE for its support in this endeavor.”