High-yield fabrication of suspended graphene membranes
Researchers from the Chair for Electronic Devices at RWTH and at AMO GmbH have demonstrated a method for fabricating large-scale arrays of micro cavities sealed by graphene membranes with high yield. High mechanical strength, extreme thinness and exceptional hermeticity make graphene an ideal material for the realisation of micro- and nanoelectromechanical systems based on suspended […]