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Examples of arrays of suspended graphene membranes over closed cavities realized with the method developed by Lukas and coworkers. The membranes are analyzed with an automated SEM tool. Intact membranes are highlighted in green, broken membranes in red.

High-yield fabrication of suspended graphene membranes

Researchers from the Chair for Electronic Devices at RWTH and at AMO GmbH have demonstrated a method for fabricating large-scale arrays of micro cavities sealed by graphene membranes with high yield. High mechanical strength, extreme thinness and exceptional hermeticity make graphene an ideal material for the realisation of micro- and nanoelectromechanical systems based on suspended […]

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A non-destructive method to probe inter-layer coupling on millimeter-scale graphene-MoS2 heterostructures

One of the great assets of two-dimensional (2D) materials is the possibility of pacing different materials on top of each other to form heterostructures with properties tailored to specific application scenarios. However, the quality of the final material stack strongly depends on the electronic coupling between the different materials. Measuring this coupling in a non-destructive […]

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