The ability to manufacture components with critical dimensions in the range of a few nanometers is the basis for research into new device concepts and innovative materials. At AMO, we are constantly developing and expanding our equipment and know-how for manufacturing components at the nanoscale.

Our technology platform enables us to react quickly and flexibly to new technical developments. We are constantly optimizing our nanostructuring processes, always keeping in mind the need for a high degree of compatibility with industrial manufacturing processes and the scalability to large production volumes.

Group Leader: Dr. Ing. Jens Bolten


Dr.-Ing. Jens Bolten

Group Leader - Nanostructuring