Research at AMO is performed mainly in AMICA, the Advanced Microelectronic Center Aachen, whose main building block, a highly flexible 400 m² cleanroom, is equipped with advanced lithography tools and process facilities for pattern transfer on a nanometer scale. The large body of lithography tools and processes forms the backbone for the realization of nanostructures in a wide range of materials required to explore the potentials of nanotechnology. Within the research performed at AMO nanotechnology serves as an entry point to the area of nanoelectronics and nanophotonics. The convergence of this two research directions in one material or multifunctional component is the final step. The potentials emerging from this convergence for KETs and advanced components are analyzed particularly in the area of sensorics.
The four main research fields at AMO are the following: