AMO

Publications

Below you find AMO’s publications resulting from the scientific effort in the different fields of research spanning the time period from 1997 till today. Use the filter to find the publications matching your interest.

Filter

Topic:
Year:

Large scale UV-based Nanoimprint lithography


Topic: Nanoimprint Lithography
Publication Type: Article
B. Vratzov, A. Fuchs, M. Lemme, W. Henschel, H. Kurz
Source: Journal of Vacuum Science Technology B, Vol. 21 (6) 2003, pp. 2760-2764

2003

Large Scale UV-based Nanoimprint Lithography


Topic: Nanoimprint Lithography
Publication Type: Conference Presentation
B. Vratzov, A. Fuchs, M. Lemme, W. Henschel and H. Kurz.
Source: EIPBN 2003, Tampa/USA, May 2003

2003

Highly selective HBr etch process for fabrication of Triple-Gate nano-scale SOI-MOSFETs


Topic: Nanoelectronics
Publication Type: Conference Presentation
M.C. Lemme, T. Mollenhauer, H. Gottlob, W. Henschel, J. Efavi, C. Welch, H. Kurz
Source: Micro- and Nano Engineering Conference 2003 (MNE 2003, Cambridge/UK, September, 2003

2003

Floating Dot Memory Transistors on Silicon On Insulator Substrate


Topic: Nanoelectronics
Publication Type: Conference Presentation
O. Winkler, M. Baus, M. Lemme, B. Spangenberg, H. Kurz
Source: European Congress on Advanced Materials and Processes, EUROMAT 2003, Lausanne/Switzerland, September 2003

2003

Fabrication of 12nm electrically variable shallow junction metal-oxide-semiconductor field effect transistors on silicon on insulator substrates


Topic: Electron Beam Lithography, Nanoelectronics
Publication Type: Article
W. Henschel, T. Wahlbrink, Y.M. Georgiev, M. Lemme, B. Vratzov, A. Fuchs, T. Mollenhauer, H. Kurz
Source: Journal of Vacuum Science Technology B, Vol. 21 (6) 2003, pp. 2975-2979

2003

Fabrication of 12nm EJ-MOSFETs on SOI-substrates


Topic: Electron Beam Lithography, Nanoelectronics
Publication Type: Conference Presentation
W. Henschel, T. Wahlbrink, Y.M. Georgiev, M. Lemme, T. Mollenhauer, B. Vratzov, A. Fuchs and H. Kurz
Source: EIPBN 2003, Tampa/USA, May 2003

2003

Asymmetrically Coupled Silicon-On-Insulator Microring Resonators for Compact Add-Drop Multiplexers


Topic: Nanophotonics
Publication Type: Article
A. Vörckel, M. Mönster, W. Henschel, P. Haring Bolivar and H. Kurz
Source: IEEE Photonics Technology Letters, Volumne 15 (7)2003, pp. 921-923

2003

Hochskalierung von Masterstempeln und Topographie – Lithographie für die Nanoimprint Technologie, innerhalb des BMBF -Verbundprojektes “Massiv paralleles Nanoimprint”


Publication Type: Report
Boris Vratzov
Source: Abschlußbericht des BMBF-Projekts, FKZ: 13N7402/8, Projektzeitraum: 1.9.1998 bis 31.1.2002

2002

UV-Nanoimprint-Lithography in Europe


Topic: Nanoimprint Lithography
Publication Type: Conference Presentation, Invited Paper
H. Kurz (invited paper)
Source: First International Conference on NNT 2002, San Francisco/USA, December 11-13, 2002.

2002

UV-Nanoimprint Lithography a promising alternative


Topic: Nanoimprint Lithography
Publication Type: Conference Presentation
H. Kurz, B. Vratzov, A. Fuchs, B. Spangenberg, M. Bender, M. Otto
Source: International Workshop on NanoImprint Lithography 2002, Lund/Sweden, January 16-17, 2002

2002

Tunable distributed-feedback laser gratings for telecom applications, manufactured by electron-beam lithography


Topic: Electron Beam Lithography, Nanophotonics
Publication Type: Article
S. A. Rishton, B. Pezeshki, S. Zou, G. Yoffe and W. Henschel
Source: J. Vac. Sci. Technol. B, Volumne 20(6) 2002, pp.2749-2752

2002

Nano-CMOS Bauelemente mit multipler Gate-Struktur


Topic: Nanoelectronics
Publication Type: Conference Presentation
M. Lemme, W. Henschel, T. Mollenhauer, T. Wahlbrink, H. Kurz, M. Baus, M. Heuser, O. Winkler, B. Spangenberg, R. Granzner, M. Kittler, V. Polyakov, F. Schwierz.
Source: Workshop Nano-de 2002, Bonn/Germany, May 2002

2002

Microelectronic Engineering, Vol. 67-68, pp. 810-817, 2003.


Topic: Nanoelectronics
Publication Type: Conference Proceedings
M. Lemme, T. Mollenhauer, W. Henschel, B. Vratzov, A. Fuchs, T. Wahlbrink, M. Heuser, M. Baus, B. Spangenberg, H. Kurz
Source: Proceedings of 3rd European Workshop on Ultimate Integration of Silicon, ULIS 2002, 07-08.03.2002 Munich/Germany,pp.159-163

2002

Large scale homogeneity of UV based Nanoimprint


Topic: Nanoimprint Lithography
Publication Type: Conference Presentation
A. Fuchs, B. Vratzov, M. Lemme, W. Henschel, H. Kurz
Source: First International Conference on NNT 2002, San Francisco/USA, December 11-13, 2002.

2002

Influence of Channel Width on n- and p-type Nano-Wire-MOSFETs on Silicon on Insulator Substrate


Topic: Nanoelectronics
Publication Type: Conference Presentation
M. Lemme, T. Mollenhauer, W. Henschel, T. Wahlbrink, M. Heuser, M. Baus, O. Winkler, B. Spangenberg, R. Granzner, F. Schwierz, H. Kurz
Source: MNE 2002, Lugano/Switzerland, September 2002

2002

Fabrication of wire MOSFETs on silicon-on-insulator substrates


Topic: Nanoelectronics
Publication Type: Article
M. Heuser, M. Baus, B. Hadam, O. Winkler, B. Spangenberg, R. Granzner, M. Lemme, H. Kurz
Source: Microelectronic Engineering, Vol. 61-62 2002, pp. 613-618

2002

Fabrication and characterization of 2D Photonic Crystal Add Drop Multiplexers on SOI


Topic: Electron Beam Lithography, Nanophotonics
Publication Type: Conference Presentation
A. Vörckel, M. Mönster, W. Henschel, P. Haring Bolivar, H. Kurz
Source: Vacuum, Vol. 77 (2) 2005, pp. 117-123

2002

Einsatz der Elektronenstrahl-Lithographie im Nanokosmos


Topic: Electron Beam Lithography
Publication Type: Conference Presentation
W. Henschel, Y. Georgiev, H. Kurz
Source: Workshop Nano-de 2002, Bonn, Mai 2002

2002

Double Gate Nano-MOSFET auf SOI-Substrat


Topic: Nanoelectronics
Publication Type: Conference Presentation
W. Henschel, M. Lemme, T. Wahlbrink, T. Mollenhauer, H. Kurz, M. Kittler, R. Granzner, F. Schwierz
Source: Workshop Nano-de 2002, Bonn/Germany, May 2002

2002

Structural and optical properties of vertically correlated Ge Island layers grown at low temperatures


Topic: Nanoelectronics
Publication Type: Conference Proceedings
M. Herbst, C. Schramm, K. Brunner, T. Asperger, H. Riedl, G. Abstreiter, A.Vörckel, H. Kurz, E. Müller
Source: Proceedings of MRS Spring Meeting,16-20.04.2001 San Francisco / USA, 2001

2001