Product and services
An overview of the products and services available to our customers and partners.
AMO offers its customers the opportunity to fabricate graphene devices according to their specific needs. Customers can choose between single wafers tailored to their specific requirements and multi-project wafers offered as part of the 2D EPL project. The devices include back-gated, top-gated and dual-gated transistors that enable sensing applications (e.g. Hall sensors, biosensors, etc.). It is also possible to fabricate integrated circuits such as graphene integrated MMICs.
As part of its graphene foundry services, AMO also supports customers in developing their own processes. Detailed capabilities and applications can be discussed in one-to-one meetings. Below are some technology key points.
- Size 1×1 cm up to 8″
- Flexible substrates
Structuring / Lithography
- Resolution up to 100 nm
- Up to 4-layer lithography
- Etching (wet & dry)
- Lift-off processes
- Different CVD systems (SiO2, Si3N4, graphene, …)
- ALD (Al2O3, TiO2, AlN, TaN, TiN)
- Sputtering (Cu, Ni, …)
- Evaporation (Al, Ni, Au, Pd, Ti, Cr)
- In-house wet transfer of graphene
- Electrical measurements (DC, RF)
- Raman spectroscopy
- Ellipsometer measurements
- Electron microscopy
- Optical microscopy